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One stop solution of precision ceramic components

Products / Services
- Electrostatic Chuck (ESC)
  Refurbishment
- Aluminum Nitride Heater
- Porous Ceramic Vacuum Chuck
- Aluminum Nitride Substrate
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  Email:Sales@semixicon.com  
  Phone: 510-918-1896  
  Add: 46560 Fremont Blvd, Suite 117, Fremont, CA94538  
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  Aluminum Nitride Substrate

Aluminum Nitride ceramic substrate has a thermal conductivity more than 170 W/m-K and high electrical resistivity, the new material is gaining more and more application in semiconductor and electronic industries.

For other tailor made dimensions, please contact us for quote with cost and lead time.

 





 
         
 

Item

Unit

Type

AN-170

AN-200

Dimension

inch

2x2/4x4/6x6/8x8,12"×12" (max)

6"×6" (max)

Thickness

mm

0.385/0.635/1.0/1.2 

0.385≦ t ≦1.5

10.0 (max)

 Through hole

mm

≧φ0.1

≧φ0.1

Density

g/cm3

3.3-3.35

3.33-3.36

Thermal Conductivity

W/(m.k))

170-190

>200