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One stop solution of precision ceramic components

Products / Services
- Electrostatic Chuck (ESC)
- Aluminum Nitride Heater
- Porous Ceramic Vacuum Chuck
- Aluminum Nitride Substrate
  Contact Us  
  Phone: 510-918-1896  
  Add: 46560 Fremont Blvd, Suite 117, Fremont, CA94538  
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  Aluminum Nitride Wafer Heater

Aluminum Nitride heater is used in CVD,PVD and ALD etc processes utilizing the high thermal conductivity and plasma resistance properties of aluminum nitride, we refurbish and build new Aluminum Nitride Heaters.